CVD vacuum coating machine

Cutting tools PECVD vacuum coating equipment

This machine is to configure a new target and radio frequency power, the ion source is stable . It is not easy running arc, the current is low and ion particles is small. Applied to metal, ceramics, glass and other materials of the surface coating of hard metal membrane and membrane metal compounds. Pumping speed faster, vacuum stability, and superior quality film, widely used in watches, glasses, information products, tools, dies, metal, glass, ceramics, building materials, and other surface treatment industry.

TiN,TiC,ZrN,CrN,Ti,Ni,Cr,Cu and other compounds film, multi-layer super-hard film, nitrogen-doped titanium film and the alloy film, and in a very short time to complete all the machining process, it is a highly efficient multi-functional coating equipment.

Main Features:

1. The vacuum chamber is a vertical type single door structure made of stainless steel. Chamber sizeΦ1400~2500mm

2. The vacuum system is composed of mechanical pump, roots pump, and diffusion pump.

3. Coating system for 10~28 arc or 1~4 arc column or plane arc.

4. High power pulse bias power source.

5. Inflating system has 1~4 sets mass flow control instrument and a gas flow display.

6. The electrical control system is equipped with sound and light alarm devices for circuit overload, water cutoff and air cutoff.

7. The control system (touch screen + PLC) displays detailed parameters at real time and controls the entire production process fully automatically under automatic running mode.

Technical Parameters: