optical thin-films deposition machines(electron gun)

Function

Inner Size

tray,satisfy customers’

demand of uniformity to a greater extent,rotate 5 to 30 r/min,

Continuously Variable

Transmission

1 Arch single workpiece tray,satisfy customers’

demand of uniformity to a greater extent,rotate 5 to 30 r/min, Continuously Variable Transmission.

2 Arch three workpiece tray,planetary,

revolution-autorotation, satisfy customers’

demand of productivity,rotate 5 to 30 r/min,

Continuously Variable Transmission

Vacuum system

KT-600(VAKIA),

Roots Pump ZJ-300,

Mechanical pump2X-70,

Holding pump2X-8,

Pipeline is made of

304 Stainless Steel

KT-800(VAKIA),

Roots Pump ZJ-600,

Mechanical pump2X-70,

Holding pump2X-8,

Pipeline is made of

304 Stainless Steel

KT-800(VAKIA),

Roots Pump ZJ-300,

Mechanical pump2X-70,

Holding pump2X-15,

Pipeline is made of

304 Stainless Steel

Ultimate Vacuum:superior to 6.0×10^-4Pa

Be equipped with anti-turbulence device,safety interlock, Automatic and Manual operation mode optional

Heating on the thermotube,PID control,highest 350 °C±1.5°C

Gas mass control meter or gas filled valve

Which can be manually fine tuning

bombardment

Direct Current3KV,0.6KW clavate cathode(used for cleaning

Workpiece by itself before coating) and gas ion source select

Evaporation source(selected)

1 Electron gun:6KW,high pressure4 KV to 10 KV adjustable. Positioning scanning,triangular scanning,circular scanning,spiral scanning,orthogonal scanning,sine wave, focusing capability of beam spot is good,positioning accuracy is high, good reproducibility

2 crucible:six pointsφ38*20 crucible or four pointsφ38*20 plus anotherpoint arc crucible which center arc length is 87(used for high consumption and low melting point of evaporation material) or crucibleφ48*18

1.5KV hall ion source:used for cleaning before electroplating or assisted deposition,which helped acquiring the higher refractivity,firmness,good

compactness and strong adhesion

Coating control

system(selected)

Quartz crystal film thickness control meter:can store up 1 to 99 layer

automation coating process,99 kinds of data,is of high precision

Optical film thickness control meter:adopted multi-wave full spectrum

destination analysis technology,judge film layer through the curve analysis of 370 to 870mm transmissivity (or reflectivity) of monitoring chips,can achieve high control precision