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1.Vacuum Magnetron Sputtering Technology, 2.Coating machines Limiting vacuum is 8x10-4 Pa,, 3.Unit Limiting Vacuum 8x10-4Pa - details see: https://www.machineto.com/solar-vacuum-tube-coating-machine-oem-for-your-requirement-10162328

Solar vacuum tube coating machine(OEM for your requirement)

Coating machine technical data

1,

NO.	Items	Technical requirement
1	Vacuum Unit deploy	1,Unit Limiting Vacuum 8x10-4Pa 2,KT-600 oil diffusion pump 1set,Limiting Vacuum 8x10-5Pa,pumping speed 12000L/S 3,Pre-drawing 2XT-70 Rotary-vane Pump 3sets,Limiting Vacuum 1.33Pa,pumping speed 70L/S 4,Maintaining 2XT-15 Rotary-vane Pump1set,Limiting Vacuum 1.33Pa,pumping speed 15L/S
2	Vacuum chamber	1set,stainless steel front-opening tank diameter 1050mmX2130mm.through the observation window you can check the operation situation.
3	Control power	1set,PLC controlling coating machine operation,observe operation instruction and technological parameter.
4	Sputtering power	Two sets,Zhuhai invert power 30Kw/set
5	Sputtering magnetic control target	Three ,we have three kinds of target materials,aluminium,copper,stainless steel,target size outer diameter 70mm,inner diameter 54mm
6	Weight	Tank bottom unit mechanical pump
7	Flowing baffle	Electronic control Pneumatic baffle,material ,stainless steel
8	Rotating stand control	Nissan inverter
9	Bias power	Non
10	Turntable	Tubes diameter 47mmX height1800mm=60 pieces
11	Mass flow meter	Two sets,flow 200Sccm

2,The machine is equipped with magnetic control target for coaxial cylindrical target, magnet size 11mmX12mmX50mm;

3,It Has broken off the water, phase, sound and light alarm function; The installed power is 90 KW

4,Coating machines Limiting vacuum is 8 x10-4 Pa, pumping speed from the atmosphere to 6.67x10-3Pa≤15min(empty furnace, no load)

5,The surface treatment of Coating machine door body and unit color can be produced according to user's requirements

Vacuum exhaust unit technology parameters

1,

NO.	Items	Technical requirement
1	Vacuum Unit deploy	1,Unit Limiting Vacuum 1.3x10-3Pa K-200 oil diffusion pump 1set,2XT-15 Rotary-vane Pump 1 set
2	Exhaust work piece height	1800mm
3	QTY	40—50piece
4	The match for electricity	Half a braking control, safe interlock, leakage automatic protection
5	Composite vacuum machine	Produced In tsinghua

2,Quotation diameter 58*40pcs*1800

diameter58*50pcs*1800

3,Installed power 32KW