Model Function | VAKIA-SRC-900 | VAKIA-SRC-1000 | VAKIA-SRC -1200 | VAKIA-SRC-1400 | VAKIA-SRC-1500 | VAKIA-SRC-1800 |
Vacuum Chamber Inner Size | φ900*H1100mm | φ1000*H1200mm | φ1200*H1500mm | φ1400*H1800mm | φ1500*H1900mm | φ1800*H2000mm |
Power Supply Type | Resistance Evaporation Power Supply,Ion bombardment Power Supply,Filament power supply,Pulse Bias Power Supply,Direct Current magnetron power Supply,Medium Frequency Magnetron Power Supply |
Structure of Vacuum Chamber | Vertical Double Door,Vertical Single Door,Horizontal Single Door,Back Vacuum Acquisition System |
Material of Vacuum Chamber | Superior Stainless Steel Chamber |
Ultimate Vacuum | 8.0×10-4Pa |
Pump-out Time(no-load) | From air to 5.0×10-2Pa≤8min |
Vacuum Acquisition System | Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer’s demand) |
Coating Style | Evaporation coating+magnetron sputtering coating |
Kinds of Film | metal film,semi-transparent film,Non conductive vacuum metallization film Electromagnetic Interference film,Dielectric film |
The Style of Magnetron target | Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target |
Power of Magnetron bias power supply and the number of magnetron target | The appropriate equipment is selected according to demanders’requirements and different techniques |
Work Piece Rotation maximum valid diameter | 6 axisφ260mm | 6 axisφ280mm | 6 axisφ360mm 8 axisφ280mm | 6 axisφ420mm 8 axisφ350mm | 6 axis φ460mm 8 axisφ380mm | 6 axisφ560mm 8 axisφ460mm |
Evaporation electrode | Standard configure 2 pair |
Evaporation Power | 15KW | 15KW | 20KW | 25 KW | 30KW | 35KW |
Total Power | 50KW | 50KW | 65KW | 85 KW | 100KW | 135KW |
Process Gas | Two or three process gas flow control and display system,select automatic filling system |
Cooling System | Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed(which are supplied by demander) |
Work Piece Rotating Stand and Rotating Style | Planetary revolution-autorotation and frequency conversion speed regulation (controlled and adjustable) |
Control Mode | Automatic and Manual operation modes integrated,touch screen,PLC or computer control |
Alarm and Protection | It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock. |
Cover Area | W3m×L3m | W3m×L3m | W3.5m×L4m | W5m×L5m | W6m×L6m | W6m×L8m |
Other Technical Parameters | Water pressure≥0.2MPa,water temperature≤25°C,gas pressure0.5-0.8MPa |
Remark | Designed flexible and select the appropriate equipment according to demanders’requirements |