Etelux vacuum coating system

Etelux vacuum coating system:

This series of equipment mainly achieve the thermal evaporation coating / magnetron sputtering functions, applicable to laboratory and pilot production of pre-industrialization in the preparation of simple substance, oxide, dielectric, semiconductor compounds, high-temperature superconducting thin films, metal organic light-emitting film, etc.

1. be made up of the vacuum evaporation coating chamber, and the glove box.

2. the glove box is connected with a spin coater.

3. offer design

Mrganic/metal evaporation chamber:

Make in SUS304 stainless steel,rectangular,slide the door to open in the front and could open a door in the back,viewing window equiped on the door

Chamber clear dimension:L×W×H:400×400×H450;

Chamber equiped with illumination and film thickness system and other connector

Vacuum system:

Compound turbo pump(speed 1200L/S)+joint venture mechanical pump (speed 9L/S),high vacuum baffle valve

Substrate platform:

Drawer structure,maximum loaded 120*120mm substrate;and equiped baffle;

Substrate was sealed with magnetic,and motor driver,rotation speed 0-20r/min and adjustable

Substrate heating:room temperature~300°C,PID Intelligent temperature control system,and equip pneumatic substrate baffle

Vertical distance between copple and sample≥300mm;